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==Stylus Profiler (Tencor P17) ==
==Stylus Profiler (Tencor P17) ==


The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as stress mapping and roughness measurements. It has more advanced options for stress measurements than the Dektak XTA and allows the user to measure a stress map with down to 5° radial resolution.  
The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as stress mapping and roughness measurements. It has more advanced options for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] than the Dektak XTA and allows the user to measure a stress map with down to 5° radial resolution.  


A line profile measurement can be done across a specific structure by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure many parallel scans, mapping out a surface, or to program a sequence of scans in different locations on a wafer defined with respect to some deskew points. [[Specific_Process_Knowledge/Characterization/Stress_measurement|Stress measurements]] of thin films on a wafer can be done by measuring the wafer's curvature.
A line profile may be done across a specific structure located with a camera. It is also possible to measure many parallel scans to map out a surface, or to program a sequence of scans in different locations on a wafer defined with respect to some deskew points. Programming a sequence is somewhat easier and the manual for doing it much better for the P17 than for the Dektak XTA.


A disadvantage of the P17 is that is can be hard to locate the structures one wants to measure as the maximum field of view of the camera is 1x1.5 mm. We recommend knowing your sample well or having a picture of the sample design available so you can easily locate the features of interest.
A disadvantage of the P17 is that is can be hard to locate the structures one wants to measure as the maximum field of view of the camera is 1x1.5 mm. We recommend knowing your sample well or having a picture of the sample design available so you can easily locate the features of interest. Otherwise the P17 is easy to use, fast and accurate, just like the DektakXT.
 
Otherwise the P17 is easy to use, fast and very reliable in its measurement accuracy, just like the DektakXT.


'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''  
'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''  
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[[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access]]
[[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access]]


===Equipment performance and process related parameters Stylus Profiler (Tencor P17)===
===Equipment performance and process related parameters===
Note more technical specifications are found in the manual on LabManager.


[[image:KLA-Tencor P17 profiler.jpg|275x275px|right|thumb|Front of the P17 profiler located in cleanroom F-2.]]
[[image:KLA-Tencor P17 profiler.jpg|275x275px|right|thumb|Front of the P17 profiler located in cleanroom F-2.]]
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