Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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|Profiler for measuring microstructures. Excellent stress measurements. | |Profiler for measuring microstructures. Excellent stress measurements. Excellent sequence programs. Also wafer mapping and roughness measurements. | ||
|Profiler for measuring microstructures. | |Profiler for measuring microstructures. Quick and easy vertical profiling. Also wafer mapping, roughness and stress measurements. | ||
|3D Profiler for measuring microstructures and surface roughness. Can do wafer mapping. | |3D Profiler for measuring microstructures and surface roughness. Can do wafer mapping. | ||
|3D Profiler for measuring microstructures and surface roughness. Can do wafer mapping. Located in the basement. | |3D Profiler for measuring microstructures and surface roughness. Can do wafer mapping. Located in the basement. | ||