Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 70: | Line 70: | ||
|[https://www.allresist.com/wp-content/uploads/sites/2/2020/03/SXAR-N8200-1_english_Allresist_product_information.pdf Medusa 82 info] | |[https://www.allresist.com/wp-content/uploads/sites/2/2020/03/SXAR-N8200-1_english_Allresist_product_information.pdf Medusa 82 info] | ||
|[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: Labspin 02/03]] | |[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: Labspin 02/03]] | ||
| | |AR 600-07 | ||
|AR 300-47 | |AR 300-47 | ||
|DIW | |DIW | ||
| | |BOE | ||
| a = ?, b = ? | | a = ?, b = ? | ||
|150C, 10 min | |150C, 10 min | ||