Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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| Line 75: | Line 75: | ||
|AR 300-47 | |AR 300-47 | ||
|DIW | |DIW | ||
| | |150C, 10 min | ||
| a = ?, b = ? | | a = ?, b = ? | ||
| Line 75: | Line 75: | ||
|AR 300-47 | |AR 300-47 | ||
|DIW | |DIW | ||
| | |150C, 10 min | ||
| a = ?, b = ? | | a = ?, b = ? | ||