Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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<pre> | <pre> | ||
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MAGAZIN ' | MAGAZIN 'MYFIRSTEBL' The magazine name is MYFIRSTEBL; max. 20 capital letters | ||
#6 Cassette from slot no. 6 is used | #6 Cassette from slot no. 6 is used | ||