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| =Lithography Tool Package Training= | | =Lithography Tool Package Training= |
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| | DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab. |
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| DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
| | You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom). |
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| The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
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| '''For details, dates, and course material, please check the course description under [[LabAdviser/Courses#The_Lithography_TPT|Courses]].''' | | '''For details, dates, and course material, please check the course description under [[LabAdviser/Courses#The_Lithography_TPT|Courses]].''' |
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| !Schedule | | !Signing up for the course |
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| <!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
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| '''Theoretical part'''
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| * Lecture videos that can be viewed at one's leisure.
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| * A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30).
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| <!--* NEXT "questions and exercises" sessions: '''24th of March, 31st of March, 21st of April, 28th of April, 19th of May'''-->
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| '''Practical part'''
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| * A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30).
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| <!--* NEXT training sessions: '''29th of March, 5th of April, 26th of April, 3rd of May, 24th of May'''-->
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| * This part is not mandatory, and may be replaced by individual trainings if relevant.
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| !Location
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| '''Theoretical part'''
| | The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Lithography". |
| * The location of the "questions and exercises" session is room 121A in building 345C.
| | *Log into DTU Learn here: [https://learn.inside.dtu.dk DTU Learn] |
| '''Practical part'''
| | *Select the menu "Discover" |
| * The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
| | *Search for "Nanolab" |
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| | Select the course "DTU Nanolab TPT: Lithography" |
| | | *Press "Enroll in Course" |
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| | *You have now signed up for the course. |
| !Qualified Prerequisites
| | *Go to the course page in DTU Learn and choose "Course Content" and "Content" |
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| | *Watch the lecture videos, read the learning material, and complete all the quizzes. |
| * Cleanroom safety course at DTU Nanolab
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| * Admission to the cleanroom must be obtained before the training session | |
| * Theoretical part must be completed before the training session | |
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| !Preparations
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| '''Before the "questions and exercises" session'''
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| * Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus) | |
| * Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. | |
| '''Before training session'''
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| * Complete the theoretical part (Q&E) | |
| * Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic). | |
| * Study the equipment manuals. The manuals are available in LabManager. | |
| * Study the TPT process flows (first print, and alignment).
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| <!--'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the "Knowledge and Information" section below.'''-->
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| !Course Responsible
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| The Lithography Group at DTU Nanolab [mailto:lithography@nanolab.dtu.dk lithography@nanolab.dtu.dk].
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| !Learning Objectives | | !Learning Objectives |
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| * Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
| | Learn about the fundamentals of lithographic processing in a cleanroom: |
| * Authorization to use spin coater, mask aligner, and developer at DTU Nanolab | | * Coating |
| * Calculate relevant process parameters | | * Exposure |
| * Analyze and apply your results of lithographic processing | | * Development |
| | * Post-processing |
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