DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab.
DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom).
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
'''For details, dates, and course material, please check the course description under [[LabAdviser/Courses#The_Lithography_TPT|Courses]].'''
'''For details, dates, and course material, please check the course description under [[LabAdviser/Courses#The_Lithography_TPT|Courses]].'''
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!Schedule
!Signing up for the course
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<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
'''Theoretical part'''
* Lecture videos that can be viewed at one's leisure.
* A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30).
<!--* NEXT "questions and exercises" sessions: '''24th of March, 31st of March, 21st of April, 28th of April, 19th of May'''-->
'''Practical part'''
* A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30).
<!--* NEXT training sessions: '''29th of March, 5th of April, 26th of April, 3rd of May, 24th of May'''-->
* This part is not mandatory, and may be replaced by individual trainings if relevant.
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!Location
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'''Theoretical part'''
The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Lithography".
* The location of the "questions and exercises" session is room 121A in building 345C.
*Log into DTU Learn here: [https://learn.inside.dtu.dk DTU Learn]
'''Practical part'''
*Select the menu "Discover"
* The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
*Search for "Nanolab"
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Select the course "DTU Nanolab TPT: Lithography"
*Press "Enroll in Course"
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*You have now signed up for the course.
!Qualified Prerequisites
*Go to the course page in DTU Learn and choose "Course Content" and "Content"
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*Watch the lecture videos, read the learning material, and complete all the quizzes.
* Cleanroom safety course at DTU Nanolab
* Admission to the cleanroom must be obtained before the training session
* Theoretical part must be completed before the training session
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!Preparations
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'''Before the "questions and exercises" session'''
* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
* Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
'''Before training session'''
* Complete the theoretical part (Q&E)
* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
* Study the equipment manuals. The manuals are available in LabManager.
* Study the TPT process flows (first print, and alignment).
<!--'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the "Knowledge and Information" section below.'''-->
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!Course Responsible
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The Lithography Group at DTU Nanolab [mailto:lithography@nanolab.dtu.dk lithography@nanolab.dtu.dk].
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!Learning Objectives
!Learning Objectives
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* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
Learn about the fundamentals of lithographic processing in a cleanroom:
* Authorization to use spin coater, mask aligner, and developer at DTU Nanolab
* Coating
* Calculate relevant process parameters
* Exposure
* Analyze and apply your results of lithographic processing
DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipment at DTU Nanolab.
You are required to pass this course, in order to get access to using the lithography equipment inside the DTU Nanolab fabrication facility (The Cleanroom).
For details, dates, and course material, please check the course description under Courses.
Lithography Tool Package Training
Signing up for the course
The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Lithography".
