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Hotplate temperatures are assumed surface temperatures based on the 0.90 correction factor in use on the hotplate.
Hotplate temperatures are assumed surface temperatures based on the 0.90 correction factor in use on the hotplate.
The resulting resist structure height is mapped with Dektak XTa and plotted as a contrast curve below. It is apparent that the dose and contrast is very dependent on the PEB parameters.




[[file:ARN8200DoseCurve.png]]
[[file:ARN8200DoseCurve.png]]
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