Specific Process Knowledge/Lithography/ARN8200: Difference between revisions

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[[ARN8200DoseCurve.png]]
[[file:ARN8200DoseCurve.png]]

Revision as of 16:33, 16 March 2022

AR-N 8200

AR-N 8200 is a negative E-beam resist from Allresist, it is also known as "Medusa 82". It is currently (Februrary 2022) being tested at DTU Nanolab.

Contrast curve