Specific Process Knowledge/Lithography/ARN8200: Difference between revisions
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AR-N 8200 is a negative E-beam resist from Allresist, it is also known as "Medusa 82". It is currently (Februrary 2022) being tested at DTU Nanolab. | AR-N 8200 is a negative E-beam resist from Allresist, it is also known as "Medusa 82". It is currently (Februrary 2022) being tested at DTU Nanolab. | ||
[[ | == Contrast curve == | ||
[[ARN8200DoseCurve.png]] | |||
Revision as of 16:31, 16 March 2022
AR-N 8200
AR-N 8200 is a negative E-beam resist from Allresist, it is also known as "Medusa 82". It is currently (Februrary 2022) being tested at DTU Nanolab.
