Specific Process Knowledge/Lithography/Descum: Difference between revisions
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'''Ashing of AZ MiR701 resist''' | '''Ashing of AZ MiR701 resist''' | ||
You can use different strategy planing your descum: you can change power settings or you can vary chamber pressure during descum. | You can use different strategy planing your descum: you can change power settings or you can vary chamber pressure during descum. | ||
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''Testing different pressure settings'' | ''Testing different pressure settings'' | ||
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'''Ashing of AZ5214E resist''' | '''Ashing of AZ5214E resist''' | ||