Specific Process Knowledge/Lithography/ARN8200: Difference between revisions

Revision as of 15:45, 25 February 2022

AR-N 8200 is a negative E-beam resist from Allresist, it is also known as "Medusa 82". It is currently (Februrary 2022) being tested at DTU Nanolab.

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	AR-N 8200 is a negative E-beam resist from Allresist, it is also known as "Medusa 82". It is currently (Februrary 2022) being tested at DTU Nanolab.		AR-N 8200 is a negative E-beam resist from Allresist, it is also known as "Medusa 82". It is currently (Februrary 2022) being tested at DTU Nanolab.

			[[image:ARN8200DoseTest.png]]