LabAdviser/314/Microscopy 314-307/FIB/Hydra: Difference between revisions

The Helios 5 Hydra UX DualBeam consists of two independent charged particle sources: 1- electrons, 2- plasma ions (choose from Xe, Ar, O or N).  FEG-SEM with versatile characterization capabilities. At the time being, this microscope SEM provides highest resolution among all operational SEMs at DTU Nanolab, when operated for high resolution imaging (i.e. using low kV , in-lens detector, and  in immersion mode)('''Correct? IF so remove from helios'''). This microscope is equipped with the following detectors BSE (backscatter electrons), [http://en.wikipedia.org/wiki/Electron_backscatter_diffraction electron backscatter diffraction (EBSD)] (backscatter diffraction pattern), [http://en.wikipedia.org/wiki/Energy-dispersive_X-ray_spectroscopy Energy-dispersive X-ray spectroscopy (EDS)] (X-Rays), ICE (secondary ions and electrons), etc.

The plasma focused ion beam (PFIB) with inductively coupled plasma source supporting four ion species (Xe, Ar, O, N) provides the possibility of characterization of microstructures by imaging and serial sectioning via sputtering. The microscope is equipped with a micro ('''Nano?''') manipulator for high quality TEM sample preparation and the microscope can with the AutoTEM software do automated lift-out procedures with high precision.

The combination of PFIB sputtering capabilities, and 2-dimentional imaging and mapping (in case of EDS and EBSD) facilitates 3-dimentional characterization.