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Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 910: Line 910:
! 300 µm
! 300 µm
|-
|-
!rowspan="2"| January 2013
|rowspan="2"| January 2013
!rowspan="2"| Travka05, AZ 5214, '''5% open'''
|rowspan="2"| Travka05, AZ 5214, '''5% open'''
!rowspan="2"| Process A 55 cycles or 10:05 minutes, '''C01548.01'''  
|rowspan="2"| Process A 55 cycles or 10:05 minutes, '''C01548.01'''  
| [[file:C01548.01 002mu0025.jpg |75px|frameless ]]
| [[file:C01548.01 002mu0025.jpg |75px|frameless ]]
| [[file:C01548.01 003mu0026.jpg |75px|frameless ]]
| [[file:C01548.01 003mu0026.jpg |75px|frameless ]]
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