Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions
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==Titanium deposition == | ==Titanium deposition == | ||
Titanium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment. | Titanium can be deposited by e-beam evaporation or sputtering. | ||
*[[/Ti deposition in Sputter System (Lesker)|Ti deposition in Sputter System (Lesker)]] | |||
In the chart below you can compare the different deposition equipment. | |||
The section below the chart elaborates on the use of Ti as an '''adhesion layer'''. | The section below the chart elaborates on the use of Ti as an '''adhesion layer'''. | ||