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==Platinum deposition ==
==Platinum deposition ==


Platinum can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment.  
Platinum can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment.
 
* [[Specific Process Knowledge/Thin film deposition/Deposition of Platinum/Deposition of Pt in Sputter System (Lesker)|Deposition of Pt in Sputter System (Lesker)]]




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