Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | ||
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On the order of 17 nm for the smallest range and 0.2 micron for the larger ranges '''for well-defined steps that are easy to measure''', see section | On the order of 17 nm for the smallest range for a 1 micron step and 0.2 micron for the larger ranges for a 25 micron step '''for well-defined steps that are easy to measure''', see section above. | ||
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|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | ||