Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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|style="background:LightGrey; color:black"|Resolution Z | |style="background:LightGrey; color:black"|Resolution Z | ||
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0.01 Å, 0.08 Å, or 0.6 Å according to the manufacturer for ranges 13 µm, 131 µm, and 1 mm. | 0.01 Å, 0.08 Å, or 0.6 Å according to the manufacturer for ranges 13 µm, 131 µm, and 1 mm.† | ||
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | ||
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†The resolution for the smallest range is theoretical, as this is below the noise threshold at least in our lab. | |||
===Height measurement accuracy for the Tencor P17 Stylus Profiler=== | ===Height measurement accuracy for the Tencor P17 Stylus Profiler=== | ||