Specific Process Knowledge/Characterization/Profiler: Difference between revisions

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 *The resolution for the smallest range is theoretical, as this is below the noise threshold at least in our lab.
-===Height measurement accuracy for the Tencor P17 Stylus Profiler [[Image:section under construction.jpg|70px]]===
+===Height measurement accuracy for the Tencor P17 Stylus Profiler===
-This is similar to what applies to the DektakXT as described in the previous sections. The P17 has slightly better reproducibility but as the uncertainty for small steps is dominated by the uncertainty on the step height this does not make much difference except for the largest steps, where the uncertainty will be similar to that of the medium ranges of the DektakXT.
+This is similar to what applies to the DektakXT as described above. The P17 has slightly better reproducibility but as the uncertainty for small steps is dominated by the uncertainty on the standard step height's actual size, this does not make much difference. For the larger ranges the uncertainty is similar to that of the intermediate ranges of the DektakXT. Note that just as for the Dektak, the reproducibility of your own measurements of your particular step can make a relatively large contribution to the total uncertainty, Steps in real devices are not always as easy to measure or as well defined as our standard step height measurements.
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