Specific Process Knowledge/Characterization/Profiler: Difference between revisions
| Line 54: | Line 54: | ||
|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
~ | ~ 18 nm for the 65 kÅ range; ~ 0.17 µm for the intermediate ranges, and ~0.22 µm for the 1 mm range '''for well-defined steps that are easy to measure reproducibly''' ([[#Height measurement accuracy for the DektakXT|see below]]) | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | ||