Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM: Difference between revisions
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|%PlatenDepLoad=41 |%PlatenDepTune=60 |%PlatenEtchLoad=41 |%PlatenEtchTune=60 | |%PlatenDepLoad=41 |%PlatenDepTune=60 |%PlatenEtchLoad=41 |%PlatenEtchTune=60 | ||
|Temperature=0 | |Temperature=0 | ||
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 | '''10+''']] | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM/DREM 0.5kW v2.3 | '''10+''']] | ||
}} | }} | ||
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[[Specific Process Knowledge/Etch/DRIE | |||
[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 | '''10+''']] | |||