Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM: Difference between revisions

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{{Template:Peg1RecipeTableVerCColors
{{Template:Peg1RecipeTableVerCColors
|TableHeader=DREM 0.5 kW v2.3
|TableHeader=DREM 0.5 kW recipes
}}
}}
{{Template:Peg1RecipeTableVerCAddrowColors
{{Template:Peg1RecipeTableVerCAddrowColors

Revision as of 15:56, 2 December 2021



The DREM 0.5kW v2.3 recipe is in the standard recipe folder.

DREM 0.5 kW recipes
Recipe General Pressure Gases Generators Matching Tem- pera- ture Results
C4F8 SF6 Ar Coil Platen Coil Platen
Platen Stb S/E Dp Et Cyc Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Runs Keywords
U/D H/L D B M D B M D B M D B M D B M D B M D B M L T L T L T L T
DREM 0.5kW v2.3 Clamp Substrate,Pump to base, home platen matching unit, barc1, stab 10+
U HF D/E 3 2.5 100% 100% 0.3@5 0.5@10 45 0.3@25 5 0.3@20 0.5@10 10 1.9@20 0.5@30 30 75 1.5@75,75 0.5 0.5 1 0.9@1 1@40 1 45 50 45 50 41 60 41 60 0

10+