Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM0.2kW: Difference between revisions
Created page with "= DREM 0.2kW = {{Template:Peg1RecipeTableVerCColors |TableHeader=DREM 0.2 kW v2 }} {{Template:Peg1RecipeTableVerCAddrowColors |RecipeName=DREM 0.2kW newMFC |PriorProcessSteps..." |
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{{Template:Peg1RecipeTableVerCAddrowColors | {{Template:Peg1RecipeTableVerCAddrowColors | ||
|RecipeName=DREM 0.2kW | |RecipeName=DREM 0.2kW | ||
|PriorProcessSteps= Clamp Substrate,Pump to base, home platen matching unit, barc1, stab | |PriorProcessSteps= Clamp Substrate,Pump to base, home platen matching unit, barc1, stab | ||
|Keywords= | |Keywords= | ||
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|%PlatenDepLoad=38.2 |%PlatenDepTune=53.8 |%PlatenEtchLoad=38.2 |%PlatenEtchTune=53.8 | |%PlatenDepLoad=38.2 |%PlatenDepTune=53.8 |%PlatenEtchLoad=38.2 |%PlatenEtchTune=53.8 | ||
|Temperature=0 | |Temperature=0 | ||
|Link2RecipeRun=[[Main Page/Process Logs/jmli/Pegasus3/DREM/DREM0.2kW | |Link2RecipeRun=[[Main Page/Process Logs/jmli/Pegasus3/DREM/DREM0.2kW | '''1''']] | ||
}} | }} | ||
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