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Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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|-  
|-  
|16/6-2021
|16/6-2021
|Morten Foss wafer
|150 mm wafer with standard DUV resist and a pattern of pillars of variable densities/widths
|Si /  10%
|Si /  10%
|C06695.14
|C06695.14
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