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Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3: Difference between revisions

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|-
|-
|16/6-2021
|16/6-2021
|PegReticle wafer
|150 mm wafer with standard DUV resist and PegReticle pattern
|Si /  25-50%
|Si /  25-50%
|C06692.03 pegreticle wafer
|C06692.03 pegreticle wafer
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