Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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|style="background:LightGrey; color:black"|Scan range X Y | |style="background:LightGrey; color:black"|Scan range X Y | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Line scan X: | Line scan X: 20 µm to 200 mm in a single scan. No stitching. | ||
Map scan XY: any rectangle that can be inscribed in a 200 mm circle | Map scan XY: any rectangle that can be inscribed in a 200 mm circle. Note limited resolution (max. 4 million points). Scanning a large area accurately will be slow. | ||
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|style="background:LightGrey; color:black"|Scan range Z | |style="background:LightGrey; color:black"|Scan range Z | ||