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===Equipment performance and process related parameters Stylus Profiler (Tencor P17)===
===Equipment performance and process related parameters Stylus Profiler (Tencor P17)===
Note more technical specifications are found in the manual on LabManager.


[[image:KLA-Tencor P17 profiler.jpg|275x275px|right|thumb|Front of the P17 profiler located in cleanroom F-2.]]
[[image:KLA-Tencor P17 profiler.jpg|275x275px|right|thumb|Front of the P17 profiler located in cleanroom F-2.]]
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