Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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==Stylus Profiler (Tencor P17) | ==Stylus Profiler (Tencor P17) == | ||
The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as stress mapping and roughness measurements. It has more advanced options for stress measurements than the Dektak XTA and allows the user to measure a stress map with down to 5° radial resolution. | The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as stress mapping and roughness measurements. It has more advanced options for stress measurements than the Dektak XTA and allows the user to measure a stress map with down to 5° radial resolution. | ||
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | ||
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On the order of 17 nm for the smallest range and 0.2 micron for the larger ranges, see section below. | |||
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|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | ||
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*The resolution for the smallest range is theoretical, as this is below the noise threshold at least in our lab. | *The resolution for the smallest range is theoretical, as this is below the noise threshold at least in our lab. | ||
===Height measurement accuracy for the Tencor P17 Stylus Profiler === | ===Height measurement accuracy for the Tencor P17 Stylus Profiler [[Image:section under construction.jpg|70px]]=== | ||
This is similar to what applies to the DektakXT as described in the previous sections. The P17 has slightly better reproducibility but as the uncertainty for small steps is dominated by the uncertainty on the step height this does not make much difference except for the largest steps, where the uncertainty will be similar to that of the medium ranges of the DektakXT. | |||
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