Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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Both the force setting and the scan speed are important: Too high force may compress a soft material like Al, Au or some polymers, while too low force may lead to the stylus "jumping" over features, especially if the scan speed is high. | Both the force setting and the scan speed are important: Too high force may compress a soft material like Al, Au or some polymers, while too low force may lead to the stylus "jumping" over features, especially if the scan speed is high. | ||
If the scan speed is too low and you are measuring a small step <500 nm, you may experience drift in the measurement. Of course you also must make sure the feature you are measuring is wide enough for the stylus tip to reach the bottom (see the [http://labmanager.dtu.dk/d4Show.php?id=2346&mach=304 DektakXT manual], Figure 3 for details). | If the scan speed is too low and you are measuring a small step <500 nm, you may experience drift in the measurement. Of course you also must make sure the feature you are measuring is wide enough and the scan speed is low enough for the stylus tip to reach the bottom of the feature (see the [http://labmanager.dtu.dk/d4Show.php?id=2346&mach=304 DektakXT manual], Figure 3 for details). | ||
A sharp vertical step is easiest to measure. If the step is gradual or the surface is very rough, it can be difficult to determine where to measure and how the scan should be leveled. | A sharp vertical step is easiest to measure. If the step is gradual or the surface is very rough, it can be difficult to determine where to measure and how the scan should be leveled. | ||