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Specific Process Knowledge/Wafer and sample drying/Critical Point Dryer: Difference between revisions

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After drying wafers in air, the majority of the cantilevers are bended and sticking to the underlying surface.
After drying wafers in air, the majority of the cantilevers are bended and sticking to the underlying surface.


[[Image:SiN cantilevers dryed air.ppt|300x300px|thumb|Critical point dryer: positioned in cleanroom 4]]
[[Image:SiN_cantilever_dryed_air.ppt|300x300px|thumb|Dried in air: most cantilevers are bended.]]
Dried in air: most cantilevers are bended.
Dried in air: most cantilevers are bended.