Specific Process Knowledge/Characterization/XPS

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The XPS tools at DTU Nanolab

The K-Alpha from 2007 is one of the first instruments of this type that was produced.

The Nexsa from 2019 is on the surface very similar to the K-Alpha. Its panels, however, hide a whole range of supplementary techniques.

In the basement under the cleanroom two X-ray Photoelectron Spectroscopy (XPS) systems are installed back-to-back in the center of room 904. They are both manufactured by Thermofisher and they enable the users to perform elemental and chemical analysis of samples. The XPS K-Alpha is a base technique instrument providing XPS analysis. The XPS Nexsa is an upgraded version with all options.

• The XPS K-Alpha page
• The XPS Nexsa page

Elemental analysis

The XPS instrument enables elemental analysis, chemical state analysis on the sample surface or deeper down by a depth profiling. A comparison about techniques and instruments used for elemental analysis at DTU Nanolab can be found on the page Element analysis.

More about the different possibilities of the XPS instrument is found here:

• The XPS technique
• Elemental analysis
• Depth profiling
• Carbon contamination

• Links to external material
• Links to instruction videos

Getting access to the XPS tools

Click HERE to see information on how to get access to the XPS.

Analyzing XPS spectra

The analysis of XPS spectra is an art in itself. It can be done using various software packages available on the internet. In the link below we will focus on two such examples, Avantage and CasaXPS.

• How to access XPS software
• Processing XPS data

Techniques and option on the XPS tools

Equipment		K-Alpha	Nexsa
Purpose	Main	XPS analysis using monochromated Al-Kα radiation at 1486.6 eV	XPS analysis using monochromated Al-Kα radiation at 1486.6 eV
	Alternative/complementary	Work function measurements	Work function measurements Ultraviolet Photoelectron Spectroscopy (UPS) with He I and He II UV source Ion Scattering Spectroscopy or ISS Reflected Electron Energy Loss Spectroscopy or REELS Angular Resolved Ultraviolet Photoelectron Spectroscopy (ARUPS) Raman spectroscopy
Performance	Spot size	XPS: 30µm - 400µm	XPS: 10µm - 400µm Raman: > 15 µm
	Pass energy	10-400 eV	10-400 eV (XPS and ISS)
	Analysis modes	Scanned and snapshot	Scanned, snapshot and SnapMap
	Charge compensation	Flood gun to be used for charge compensation of non conductive samples only	Flood gun to be used for charge compensation of non conductive samples and for source of low energy electrons (REELS)
	Depth profiles	Depth profiles with single Ar ion bombardment Monoatomic energy range 200-3000 eV	Depth profiles with MonoAtomic and Gas Cluster Ion Source (MAGCIS) Monoatomic energy range 200-4000 eV Cluster mode energy range: 2-8 keV Cluster size range: 75-2000 atoms
Substrates / Samples	Sample holder size	Maximum 60x60 mm	Maximum 60x60 mm
	Sample height	Maximum 20 mm	Maximum 20 mm