LabAdviser: Difference between revisions
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**[[Specific Process Knowledge/Etch|Etch]] | **[[Specific Process Knowledge/Etch|Etch]] | ||
**[[Specific Process Knowledge/Wafer cleaning|Wafer cleaning]] | **[[Specific Process Knowledge/Wafer cleaning|Wafer cleaning]] | ||
**[[Specific Process Knowledge/Wafer and sample drying|Wafer and sample drying]] | |||
**[[Specific Process Knowledge/Thermal Process|Thermal process]] | **[[Specific Process Knowledge/Thermal Process|Thermal process]] | ||
**[[Specific Process Knowledge/Imprinting|Imprinting]] | **[[Specific Process Knowledge/Imprinting|Imprinting]] | ||
Revision as of 09:44, 17 February 2010
LabAdviser is the Danchip process handbook. It covers process knowledge to be used in the cleanroom facility of DTU Danchip. The aim of LabAdviser is to gather information on processing in the facility. To begin with we aim at entering all the basic processes that are run on the equipments. On a longer term we hope LabAdviser can be the natural place for Danchip staff and all our cleanroom users to share new process knowledge with each other. This is NOT a book on the theory behind the processes - for that you need to look else where. We should also emphasize that we do not guarantee that you can repeat the results found in this handbook. The information in the book is meant to Advise you to good starting points for YOU to further optimize to YOUR needs. To enter LabAdviser you need to log in.
Contents
