Specific Process Knowledge/Thermal Process/C2 Furnace III-V oxidation: Difference between revisions
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|style="background:LightGrey; color:black"|Gasses on the system | |style="background:LightGrey; color:black"|Gasses on the system | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*N<sub>2</sub> ( | *N<sub>2</sub> (bubbler) | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
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