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Specific Process Knowledge/Thin film deposition/Deposition of Tungsten: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Eves (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,346 edits
Line 25: Line 25:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
! Layer thickness
! Layer thickness
|10Å to 50nm  
|10Å to 50nm*
|10Å to 600nm*
|10Å to 600nm  
|-
|-


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