Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan37: Difference between revisions
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{| {{table}} | {| {{table}} | ||
| align="center" style="background:#f0f0f0;"|'''Nominal trench line width''' | | align="center" style="background:#f0f0f0;"|'''Nominal trench line width''' | ||