Specific Process Knowledge/Etch/KOH Etch/ProcessInfo: Difference between revisions
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== Backside protection == | == Backside protection == | ||
It is possible to protect the backside of the wafer against the KOH etch | '''It is possible to protect the backside of the wafer against the KOH etch using special wafer holder.''' | ||
==Theory== | ==Theory== | ||