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Mbec (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
194 edits
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It is possible to protect the backside of the wafer against the KOH etch.
It is possible to protect the backside of the wafer against the KOH etch.
* Using special wafer holder. [[File:AMMT_PI_WETandem.pdf]]
* Using special wafer holder.
<gallery caption="KOH Backside Protection" widths="200px" heights="200px" perrow="2">
  Image:Tandem4.png|Tandem4 wafer holder.
  Image:Tandem4 b.png|Tandem4 holder with wafer.
</gallery>


==Theory==
==Theory==
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