Specific Process Knowledge/Etch/KOH Etch/ProcessInfo: Difference between revisions
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It is possible to protect the backside of the wafer against the KOH etch. | It is possible to protect the backside of the wafer against the KOH etch. | ||
* Using special wafer holder. [[File:AMMT_PI_WETandem.pdf]] | * Using special wafer holder. [[File:AMMT_PI_WETandem.pdf]] | ||
<gallery caption="KOH Backside Protection" widths="200px" heights="200px" perrow="2"> | <gallery caption="KOH Backside Protection" widths="200px" heights="200px" perrow="2"> | ||