Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3: Difference between revisions
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Compared to a standard SPTS DRIE Pegasus chamber, the Pegasus 3 has had the same modifications as the Pegasus 1 with the exception of the Claritas EPD system. The changes are listed below. | Compared to a standard SPTS DRIE Pegasus chamber, the Pegasus 3 has had the same modifications as the Pegasus 1 with the exception of the Claritas EPD system. The changes are listed below. | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange| | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum upgrade]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|Addition of Picoscope oscilloscope system for process monitoring]] | |||
* | The original (fast switching and with a maximum flow of 1200 sccm) SF<sub>6</sub> MFC was causing problems for a long a time so it was replaced by two new MFC's. | ||
* SF6-1: Fast switching MFC for Bosch processes with a maximum flow rate of 600 sccm. It sits in the position of the old 1200 sccm MFC on top of the plasma source.* SF6-2: Normal MFC for continuous processes with a maximum flow rate of 100 sccm. It is installed in the gas cabinet next to the Ar MFC. | |||
Revision as of 14:23, 18 August 2021
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Pegasus 3 - 150mm silicon etching
THIS PAGE IS UNDER CONSTRUCTION
The tool is ready for user training.
The user manual(s) is available, technical information and contact information can be found in LabManager:
Equipment info in LabManager
Process information
Standard recipes
Hardware changes
Compared to a standard SPTS DRIE Pegasus chamber, the Pegasus 3 has had the same modifications as the Pegasus 1 with the exception of the Claritas EPD system. The changes are listed below.
The original (fast switching and with a maximum flow of 1200 sccm) SF6 MFC was causing problems for a long a time so it was replaced by two new MFC's.
- SF6-1: Fast switching MFC for Bosch processes with a maximum flow rate of 600 sccm. It sits in the position of the old 1200 sccm MFC on top of the plasma source.* SF6-2: Normal MFC for continuous processes with a maximum flow rate of 100 sccm. It is installed in the gas cabinet next to the Ar MFC.
Other etch processes
More processes, such as for DUV resist, are currently being developed, but they are not quite 'ready for publication' at LabAdviser so please contact Jonas (mailto:jmli@dtu.dk) for more information.
Wafer bonding
To find information on how to bond wafers or chips to a carrier wafer, click here.
Internal Nanolab Process log for Pegasus 3
Process log at Nanolab [1]