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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
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'''[[Specific Process Knowledge/Etch/DRIE-Pegasus 3/StandardRecipes|Standard recipes]]'''
'''Standard recipes'''
 
*[[Specific Process Knowledge/Etch/DRIE-Pegasus 3/DREM0.5kWv2.3 |DREM 0.5kW v2.3]]


*[[Specific Process Knowledge/Etch/DRIE-Pegasus 3/Barc etch |Barc etch]]


'''Hardware changes'''
'''Hardware changes'''
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