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Specific Process Knowledge/Etch/DRIE-Pegasus/processC: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
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! Average result  
! Average result  
|-
|-
! Etch rate (µm/min)   
! Etch rate (nm/min)   
| Not specified
| Not specified
|  
|  
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