Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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# The order of commands might be wrong in either the sdf- or jdf-file; check the order of commands in the templates in the directory home/eb0/jeoleb/job/templates | # The order of commands might be wrong in either the sdf- or jdf-file; check the order of commands in the templates in the directory home/eb0/jeoleb/job/templates | ||
# The sdf- or jdf-files might have been opened in a text-program different from SuperEdi, e.g. notepad; this can corrupt the files and add linefeeds or tokens at line-ends. This can be checked in SuperEdi. In most cases, the problem can be solved by opening the sdf- and jdf-file in SuperEdi and save it again while setting the line endings to UNIX. | # The sdf- or jdf-files might have been opened in a text-program different from SuperEdi, e.g. notepad; this can corrupt the files and add linefeeds or tokens at line-ends. This can be checked in SuperEdi. In most cases, the problem can be solved by opening the sdf- and jdf-file in SuperEdi and save it again while setting the line endings to UNIX. | ||
# If none of the above works find a template home/eb0/jeoleb/job/templates and re-write your information into it, do NOT copy for the reasons of the last point above. | |||
# The path writing requires a scan speed larger than 100MHz; increase the shot pitch (SHOT) in the sdf-file and compile again. | # The path writing requires a scan speed larger than 100MHz; increase the shot pitch (SHOT) in the sdf-file and compile again. | ||