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<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.  
<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.  


The next lecture will be held on the 13th of September 2021.  
The next lecture will be held on the 13th of September 2021 from 10:00 to 12:30.
 
If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.  


Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>


<!-- The next lecture will be held online (using Zoom) on the 7th of June from 10.00 to 12.30
<!-- The next lecture will be held online (using Zoom) on the 7th of June from 10:00 to 12:30
The date will come after the summer vaction-->  
The date will come after the summer vaction-->  


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<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf
<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf


The next lecture will be held on the 17th of June 2021.
The next lecture will be held on the 20th of September 2021 from 9:00 to 12:30.
 
If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.  


Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>




Revision as of 13:12, 17 June 2021

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part

1st lecture (2 hours):

  • An introduction to thin films
  • Material properties
  • Overview of different thin film techniques at DTU Nanolab – 1st part:
    • Thermal oxidation
    • Electroplating

Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.

The next lecture will be held on the 13th of September 2021 from 10:00 to 12:30.

If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.

Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


2nd lecture (3 hours):

  • Vacuum basics
  • Overview of different thin film techniques at DTU Nanolab – 2nd part:
  • PVD (physical vapour deposition)
    • E-beam evaporation
    • Thermal evaporation
    • Sputtering
  • CVD (chemical vapour depostion)
    • LPCVD (low pressure chemical vapour deposition)
    • PECVD (plasma enhanced chemical vapour deposition)
  • ALD (atomic layer deposition)

Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf

The next lecture will be held on the 20th of September 2021 from 9:00 to 12:30.

If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.

Please also note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


Practical part

  • None
Location

Theoretical part

  • The location of the lectures will be notified in the doodles
Qualified prerequisites
  • None
Preparations
Course responsible
  • The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand importance of correct process pressure (for vacuum processes)
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Slides from lecture 2


THIS PAGE IS UNDER CONSTRUCTION

Literature

Thermal Oxidation
Stress in Thin Films
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