Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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Pretreatment, also known as ''priming'', is done before spin coating in order to ensure the best conditions for adhesion between the substrate surface and the resist. Pretreatment ranges from a simple dehydration bake over etching the native oxide to vapor phase deposition of an adhesion promoter. The goal of pretreatment is to remove any moisture that may be adsorbed on the surface of the substrate, and/or to modify the contact angle of the surface to match that of the resist to be coated on the substrate. | Pretreatment, also known as ''priming'', is done before spin coating in order to ensure the best conditions for adhesion between the substrate surface and the resist. Pretreatment ranges from a simple dehydration bake over etching the native oxide to vapor phase deposition of an adhesion promoter. The goal of pretreatment is to remove any moisture that may be adsorbed on the surface of the substrate, and/or to modify the contact angle of the surface to match that of the resist to be coated on the substrate. | ||