Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions

@@ Line 103: / Line 103: @@
 |  width="50" align="center" style="background:#f0f0f0;"|'''HMDS'''
 |  width="50" align="center" style="background:#f0f0f0;"|'''Dip/spin-on adhesion promoter'''
+|  width="50" align="center" style="background:#f0f0f0;"|'''Comment'''
 |-
 |-style="background:#DCDCDC;" align="center"
-|align="left"| Silicon with native oxide || (x) || x || x || (x)
+|align="left"| Silicon with native oxide || (x) || x || x || (x) ||
 |-
 |-style="background:#C0C0C0;" align="center"
-|align="left"|Silicon oxide || (x) ||  || x || (x)
+|align="left"|Silicon oxide || (x) ||  || x || (x) ||
 |-
 |-style="background:#DCDCDC;" align="center"
-|align="left"| Silicon nitride || (x) ||  || x || (x)
+|align="left"| Silicon nitride || (x) ||  || x || (x) ||
 |-
+|-style="background:#C0C0C0;" align="center"
+|align="left"| Glass (borofloat/pyrex) || x ||  || x || (x) || Dehydration before HMDS for best result
+|-
+|-style="background:#DCDCDC;" align="center"
+|align="left"| Fused silica || x ||  || x || (x) || Dehydration before HMDS for best result
 |}
 =HMDS=