Specific Process Knowledge/Etch/DRIE-Pegasus/DREM: Difference between revisions
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|%CoilDepLoad=40 |%CoilDepTune=50 |%CoilEtchLoad=40 |%CoilEtchTune=50 | |%CoilDepLoad=40 |%CoilDepTune=50 |%CoilEtchLoad=40 |%CoilEtchTune=50 | ||
|%PlatenDepLoad=32.5 |%PlatenDepTune=51.9 |%PlatenEtchLoad=32.5 |%PlatenEtchTune=51.9 | |%PlatenDepLoad=32.5 |%PlatenDepTune=51.9 |%PlatenEtchLoad=32.5 |%PlatenEtchTune=51.9 | ||
|%CLaritasLoad= |%ClaritasTune= |Temperature=''' | |%CLaritasLoad= |%ClaritasTune= |Temperature='''0''' | ||
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 2kW micro | ''' | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 2kW micro | '''8''']] | ||
}} | }} | ||
{{Template:Peg1RecipeTableVerBAddrowColors | {{Template:Peg1RecipeTableVerBAddrowColors | ||
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|%CoilDepLoad=40 |%CoilDepTune=50 |%CoilEtchLoad=40 |%CoilEtchTune=50 | |%CoilDepLoad=40 |%CoilDepTune=50 |%CoilEtchLoad=40 |%CoilEtchTune=50 | ||
|%PlatenDepLoad=32.5 |%PlatenDepTune=51.9 |%PlatenEtchLoad=32.5 |%PlatenEtchTune=51.9 | |%PlatenDepLoad=32.5 |%PlatenDepTune=51.9 |%PlatenEtchLoad=32.5 |%PlatenEtchTune=51.9 | ||
|%CLaritasLoad= |%ClaritasTune= |Temperature=''' | |%CLaritasLoad= |%ClaritasTune= |Temperature='''-19''' | ||
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 2kW micro at | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 2kW micro at -19 degrees | '''1''']] | ||
}} | }} | ||
|} | |} | ||