Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 2kW micro: Difference between revisions

Jmli (talk | contribs)
Created page with "=DREM meets Travka= {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |- ! rowspan="2" width="40"| Date ! colspan="2" width="120"| Substrate Informatio..."
 
Jmli (talk | contribs)
Line 1: Line 1:
=DREM meets Travka=
=DREM 2kW runs on complete set of Travka 5 to 80 % wafers=


{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"