Specific Process Knowledge/Etch/DRIE-Pegasus/DREM: Difference between revisions
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= The DREM processes = | = The DREM processes = | ||
= DREM 2kW micro = | |||
{{Template:Peg1RecipeTableVerBColors | |||
|TableHeader=DREM 2kW micro | |||
}} | |||
{{Template:Peg1RecipeTableVerBAddrowColors | |||
|RecipeName=DREM 2kW micro | |||
|PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | |||
|Keywords= | |||
|PlatenPosition=U |PlatenFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E | |||
|DepositionTime=1.2 |EtchTime=3 |NumberOfCycles= | |||
|PressureDepDelay= |PressureDepBoost= |PressureDepMain=100% | |||
|PressureEtchDelay= |PressureEtchBoost= |PressureEtchMain=100% | |||
|C4F8DepDelay=0.3@5 |C4F8DepBoost= 0.5@50 |C4F8DepMain=200 | |||
|C4F8EtchDelay=0.5@100 |C4F8EtchBoost= |C4F8EtchMain=5 | |||
|SF6DepDelay=0.3@200 |SF6DepBoost=0.5@200 |SF6DepMain=15 | |||
|SF6EtchDelay=2@15 |SF6EtchBoost=0.3@100 |SF6EtchMain=200 | |||
|O2Dep= |O2Etch= |ArDep=150 |ArEtch=150 | |||
|WCoilDep=2 |WCoilEtch=2 |WPlatenDep=1 | |||
|WPlatenEtchDelay=1@1 |WPlatenEtchBoost=1@100 |WPlatenEtchMain=1 | |||
|WClaritasDep= |WClaritasEtch= | |||
|%CoilDepLoad=40 |%CoilDepTune=50 |%CoilEtchLoad=40 |%CoilEtchTune=50 | |||
|%PlatenDepLoad=32.5 |%PlatenDepTune=51.9 |%PlatenEtchLoad=32.5 |%PlatenEtchTune=51.9 | |||
|%CLaritasLoad= |%ClaritasTune= |Temperature='''-19''' | |||
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 2kW micro | '''1''']] | |||
}} | |||
{{Template:Peg1RecipeTableVerBAddrowColors | |||
|RecipeName=DREM 2kW micro | |||
|PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | |||
|Keywords= | |||
|PlatenPosition=U |PlatenFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E | |||
|DepositionTime=1.2 |EtchTime=3 |NumberOfCycles= | |||
|PressureDepDelay= |PressureDepBoost= |PressureDepMain=100% | |||
|PressureEtchDelay= |PressureEtchBoost= |PressureEtchMain=100% | |||
|C4F8DepDelay=0.3@5 |C4F8DepBoost= 0.5@50 |C4F8DepMain=200 | |||
|C4F8EtchDelay=0.5@100 |C4F8EtchBoost= |C4F8EtchMain=5 | |||
|SF6DepDelay=0.3@200 |SF6DepBoost=0.5@200 |SF6DepMain=15 | |||
|SF6EtchDelay=2@15 |SF6EtchBoost=0.3@100 |SF6EtchMain=200 | |||
|O2Dep= |O2Etch= |ArDep=150 |ArEtch=150 | |||
|WCoilDep=2 |WCoilEtch=2 |WPlatenDep=1 | |||
|WPlatenEtchDelay=1@1 |WPlatenEtchBoost=1@100 |WPlatenEtchMain=1 | |||
|WClaritasDep= |WClaritasEtch= | |||
|%CoilDepLoad=40 |%CoilDepTune=50 |%CoilEtchLoad=40 |%CoilEtchTune=50 | |||
|%PlatenDepLoad=32.5 |%PlatenDepTune=51.9 |%PlatenEtchLoad=32.5 |%PlatenEtchTune=51.9 | |||
|%CLaritasLoad= |%ClaritasTune= |Temperature='''0''' | |||
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 2kW micro at 0 degre | '''1''']] | |||
}} | |||
|} | |||
Revision as of 11:07, 11 May 2021
The DREM processes
DREM 2kW micro
| Recipe | General | Pressure | Gases | Generators | Matching | Tem- pera- ture | Results | |||||||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| C4F8 | SF6 | O2 | Ar | Coil | Platen | Coil | Platen | |||||||||||||||||||||||||||||||||||||||
| Platen | Stb | S/E | Dp | Et | Cyc | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Runs | Keywords | |||||||||||||||||||||
| U/D | H/L | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | L | T | L | T | L | T | L | T | ||||||||||||||||
| DREM 2kW micro | Pump to base, Clamp Substrate, home platen matching unit, stabilisation | 1 | ||||||||||||||||||||||||||||||||||||||||||||
| U | HF | D/E | 1.2 | 3 | 100% | 100% | 0.3@5 | 0.5@50 | 200 | 0.5@100 | 5 | 0.3@200 | 0.5@200 | 15 | 2@15 | 0.3@100 | 200 | 150 | 150 | 2 | 2 | 1 | 1@1 | 1@100 | 1 | 40 | 50 | 40 | 50 | 32.5 | 51.9 | 32.5 | 51.9 | -19 | ||||||||||||
| DREM 2kW micro | Pump to base, Clamp Substrate, home platen matching unit, stabilisation | 1 | ||||||||||||||||||||||||||||||||||||||||||||
| U | HF | D/E | 1.2 | 3 | 100% | 100% | 0.3@5 | 0.5@50 | 200 | 0.5@100 | 5 | 0.3@200 | 0.5@200 | 15 | 2@15 | 0.3@100 | 200 | 150 | 150 | 2 | 2 | 1 | 1@1 | 1@100 | 1 | 40 | 50 | 40 | 50 | 32.5 | 51.9 | 32.5 | 51.9 | 0 | ||||||||||||