Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Difference between revisions
| Line 22: | Line 22: | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/Barc etch |Barc etch]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/Barc etch |Barc etch]] | ||
*[[/Barc Etch|Barc Etch]] | |||
*[[/SiO2 Etch|SiO2 Etch]] | *[[/SiO2 Etch|SiO2 Etch]] | ||