Specific Process Knowledge/Etch/Wet Polysilicon Etch: Difference between revisions
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HNO<sub>3</sub> : BHF : H<sub>2</sub>O - (20 : 1 : 20) | HNO<sub>3</sub> : BHF : H<sub>2</sub>O - (20 : 1 : 20) | ||
'''NB: The life time of the solution is a few days to | '''NB: The life time of the solution is a few days to 4 weeks.''' | ||
'''The user manual and contact information can be found in LabManager:''' | '''The user manual and contact information can be found in LabManager:''' | ||