Specific Process Knowledge/Characterization/XPS/Processing

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XPS data processing

You will need some kind of dedicated software to analyze and interpret the XPS spectra. The internet has many such software packages among which are:

• Avantage: Software platform developed by Thermofisher for acquisition and processing of XPS spectra on their tools. DTU has an academic license that covers all DTU projects. Other academia and commer
• CasaXPS: Commercial XPS data analysis platform. Download at http://www.casaxps.com/ .

but here we will only use the Avantage for obvious reasons. Installing it on your own PC is strongly adviced as the analysis may be time consuming.

Install Avantage

To install Avantage, please download the latest version from the internet:

• The internet

Run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo ( MSD.GTS_XPS@thermofisher.com or click here) requesting a standard processing license. You will also have to inform which system the license has to be used for:

• XPS K-Alpha: Use 'System ID KA1002'.
• XPS Nexsa: Use Serial number NXA9953214.

Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data.

How to analyze data

In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.

XPS Simplified

The web page XPS Simplified is a ThermoScientific page where you can find a lot of information about the techniques, the hardware, data analysis etc.

XPS Knowledge View

A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click HERE to get information on how to access XPS Knowledge View in Avantage.

Basic instructions

Click HERE to have a complete walk-through of an example. This includes

• Open data file
• Open and analyze survey spectrum
• Analyze high resolution spectra of the individual spectra:
  • Add background
  • Add peaks
  • Quantify
• Analyze depth profiles

Guidelines on data processing

Click HERE to see some general guidelines on data processing in Avantage.

Examples of data analysis

• Depth profile of ALD layers: Silicon wafer with 15 nm Al₂O₃, 15 nm of TiO₂ and 16 nm of HfO₂

• Depth profile of a silicon wafer with nitride, polysilicon and oxide layer

Periodic table with binding energies of all elements

• Specific Process Knowledge/Characterization/XPS/Processing/PeriodicTable